LU5512HRVF双轮驱动

LU5512HRVF双轮驱动
在一个集成系统中执行运动控制、PLC 和技术功能


由于确定性实时和短循环时间可实现高产品质量和生产率，所以优化了机器循环


组合任何数量的电轴和液压轴


预制功能模块（液压控制、同步、凸轮、凸轮控制等）


同步轴可在多个控制系统之间分布。


在位置和压力控制之间实时切换


阀门特性/受控系统自动采集


可使用 CAM 工具以图形的方式编辑和调整阀门曲线


由于通过 SIMATIC ET 200S 高速 I/O 可实现快速的信号采集/信号输出，所以压力测量和工具保护的扫描速率显著低于 1 ms


基于应用的开放式解决方案，可以满足 OEM 的个性化要求



Parker 8A-Q8CY-SSP, Quick Disconnect, AMAT 3220-01054 
Littelfuse LF Pico Fuse 4A, lot of 10 
Lot of 2, Vexta 2 Phase Driver UD2115A 
2-Phase Driver UD2115A 25703 UR2, Used 
MKS Throttle Valve 253B-13646 
SVG90 Electronic Cabinet spare parts 
SANYO BL SUPER PV SERVO AMPLIFIER PVQA0155FYNP50 
IRVINE OPTICAL CORPORATION 136PC1562 
CT AURISION 94V-0 E92481 
EDWARDS ACTIVE GAUGE CONTROLLER D38650000 
MKS i-BARATARON DIGITAL MANOMETER DMA12TCECJNN633 
BROOKS Mass Flow Controller 5850 EM series, N2 100 SCCM 
APPLIED ENERGIES 750V 3153110-001 
AMAT 3700-02795 Seal Dynamic 3/4SFT 
Connector 1/4 TBX 1/8 MNP, Male 
AMAT 0050-18655 Gas Manifold, TOP LINE, HDPCVD, ULTIMA  
VMT8_M0006 Toothed Rod Support, Lot of 5 
AMAT 0840-90089 Diode Zener 33V 5W, Lot of 6 
AMAT 0050-18654 gas manifoldline, HDPCVD, ULTIMA  
Nikon Precision 4S210-406AN GAL Chip 
PARKER VERIFLOW VALVE, 9444A0PLPN0SFSF?F, 48200029 
AMAT 3880-01644 Washer Sealing 5/16 .301ID, Lot of 5 
AMAT 0020-94228 Shim Yellow, .5mm, Lot of 2 
2 Applied materials 0100-00423 GPLIS seriplex I/O Dist 
MKS Signal Conditioner Model 621C11TBFHC 
Aera FC-7800CD Pressure Controller, Lot of 2 
UNIT Instruments Mass Flow Controller UFC-1100A 
GE FANUC SERIES 90-30 PROGRAMMABLE CONTROLLER, GE PLC 
vacuum chamber Flange, Cryo Turbo, Gate valve interface 
vacuum chamber interface Flange, look very clean 
Jennings UCS-200-15S and CVCJ-1000-3S, looks very clean 
SHB INSTRUMENTS MODLE 109 SCOPE  
IC Sensors 3145-050 lot's of 2 
Aera FC-7800CD 24Y0494 500 SSCM He Pressure Controller 
SHB INSTRUMENTS MODLE 109 SCOPE 
AMAT 3080-01163 70-MXL-0.25-KEV?LAR-B-U 
SWAGELOK PFA4-8-FTFX-9S-?3 
Aera FC-7800CD 24Y0494 500 SSCM He Pressure Controller 
MKS Pressure Controller 122BA-00100EB 
Kit, IL/NIT/BWCVD, Throttle, Valve 233067803 
Sensor, Hall-Effect 233315405, SO# 528397, Lot of 3 
AMAT 0040-77243 RING, MIRRA  
Millipore FC-2952MEP5-T, O2 GAS, 600 SCCM Range 
STEC 0.2g/min TEPO LFC LF-310A-EVD 
STEC 0.2g/min TEPO LFC LF-310A-EVD, calibration sheet 
STEC 4.0g/min TEOS LFC LF-410A-EVD 
Swagelok SS-QC8-D-8PF, NOVELLUS 22-055169-01, QD Fiting 
Novellus Swagelok SS-QC8-D-8PF QD Fiting 
APPLIED MATERIALS POWER SUPPLY DC + 2KV #5KV 
THERMOCOUPLE TYPE K 39 INCH VAC /39 INCH AIR KF40 
SIEMENS 6EW1380-4AB01 POWER SUPPLY STROMVERSORGUNG 
NIC COMPONENTS CARBON FILM FIXED RESISTORS 200 PCS 
DALE CMF-55 RESISTORS 600 PCS 
CARBON FILM RESISTOR CR-25-B 1/4 W OHM 600 PCS 
Inficon Capacitance Diaphragm Gauge CDG100A , 1333.22Pa 
Advanced energy 2279-002-A 
AMAT In line Gas filter TEM-8711-6 
SMC PSE100-A Pressure Switch controller, AMAT tool 
5 WATLOW DIN-a-Mite Style A Controller AMAT 1200-01283 
office connect Network Utilization HM816710 
MKS Baratron 141AA-00100Aa?cuum Pressure Switch  
Osaka Turbo pump TS 443CW and Turbo Controller TD360 
Leybold Quadruvac Q100 mass spectrometer, with cables 
MKS HPS 919 Hot Cathode Vacuum Controller, untested 
Panasonic AC servo driver MSD083A2XX 
SEREN I1600 ICP Generator 
AE RFPP LF-5 500 Watts RF Generator, AE 3150012 
MKS 325 Moducell pressure switch, baratron 41A, 10 torr 
Keyence Assy PNP Acid Measure Empty 02-147639-02 
AMAT 0950-90177 IC, OPO7CN Bipolar OP-Amp 
Wheel Guide Rail 201-093 
AMAT 0150-95891 Cable Assy Transzorb Protec 
AMAT 3200-01182 Cover Map DEV Front 
PRI BM26012 AB26012 and BM26011/K, Assy, V-STN XORB-100 
ENI MWD-25LD-02 RF MATCH 
IBM CD Driver 1969-010, 1S1969010970004?295, P/N 03L3051 
Hine Design Process Chamber Elevator P/N 94-1118 
116335 381163500 
VARIABLE CAPACITOR  
BM06240 R/J, COMP SIDE REV F PB02807 PRI BOARD 
MKS BARATRON HEAD UNIT MODEL# 390HA-00001, 1 TORR 
VARIABLE CAPACITOR  
18800045 SRV/S06D06 SCHALTER MICRO- mit ROLLE 
VERIFLO CORP GAS VALVE 45200254 
VARIABLE CAPACITOR, RF CAPICTOR TYPE 58 10KV, 1000 PF 
MKS BARATRON 122AA-00010BB, 10 TORR, used 
70019093/A 0001 DAN T-A, Ruben Cable and connector 
VARIABLE CAPACITOR  
MKS BARATRON 141AA-00100AA, 100 TORR, LOOKS VERY CLEAN 
BM19261L01/C  
MKS baratron 141A-13957----S?, 100 TORR, looks clean 
RENISHAW X-Y Stage, XY Stage S83867 
MKS baratron 124AA-00010BB, 10 TORR, used 
MKS baratron 127AAX-000100T, 10 TORR lots of 2 
MKS baratron 124AA-00010BB, 10 TORR, lots of 2 
4 AMAT 3300-02640 FTG TBG NUT FEM, 1/4VCR FEMALE CAP  
MKS BARATRON 122A-11063, 10 TORR, used, as is 
MKS BARATRON 122B-11993, 100 TORR, used, as is 
MKS BARATRON 124AA-00010BB, 10 TORR, used, as is 
AMAT 3300-03452 FTG TBG RDCR 1/2T X 1T SWAGELOK 2  
3 LEYBOLD DRIS DRYVAC REMOTE INDICATOR, 306838-2002 
4 ALLEN BRADLEY TIGHTENING TORQUE 16LB-IN/1.8NM  
APPLIED MATERIALS VALVE AIR ACTUATEO DIAPH 
STEC MFC PV-1000, Piezo valve PV-1501MC NEW 
VME MOTOROLA 2304-900 
19801004800874 JZ29A-01 MEIDEN, MU24A30756 
STEC MFC SEC-4600MO, N2, 100 SLM Used 
FABR 016763 REV A 
STEC MFC SEC-4550, O2, 50 SLM, looks clean 
OMGEA 6100, 6132H 
OMGEA 6100, 6102 
DSC-002 99A5 PCB BOARD 
STEC MFC SEF-8460SL, N2, 50 SLM, looks clean 
EAGLE SIGNAL B856-511control?ler 
PTI4 4896 
OMEGA ENGINEERING CN9422 
PROM DISK 66700301 
STEC MFC SEC-4550M, N2, 40 SLM used 
FUJI ELECTRIC PXZ-9 Controller 
FSC 4321 FIRE BUS S/N 127256 M/N SS4-A 
BOARD CASSETTE SENSOR 17000317  
FUJI ELECTRIC PYZ9 controller 
COLE PARMER 32915-68 Flow Meter 
OMEGA IVL-2608A Flow meter 
0P76003 JITTER GENERATOR 
MKS HPS 325 MODUCELL Cat# 103250028 PIRANI vacuum gauge 
TWO CTI CRYOGENICS 8107813G001, 8F cryopump, used 
COLE PARMER 32907-86 Flow meter 
7 Sanyo Denki PM0PA1C20 PM DRIVER TYPE C 
2 HARMONIC DRIVE SYSTEMS Hi-T Drive Step Motor 
352 Gauge controller GRANVILLE-PHILL?IPS, model # 112 
3 SMC NP420-DN1 SERIAL INTERFACE UNIT, SMC Manifold 
9535006 0411577500 
UNIT UFC-8160, NF3, SiH4, PH3, lots of 3, used 
OMEGA HH-F10 air speed indicator 
Yashawa Servo Motor R02SA20D, AMAT 1080-01129 
AMAT 0226-97904 Throttle valve for Etch Chamber, New 
2 K-Tec RCD300M2 Residual Current Relay AMAT 1200-01550 
Advanced Energy PDW 600, AE 3156014 Lam # 853-15516-003 
MKS ENI GMW-50 RF Generator, untested 
ALD HDSIOC 0 NOVELLUS 02-295367-00 VERSION 5.0 REV. A 
NOVELLUS 27-156710-00 CONTROLLER I/O DUALCAP VERS. 4.8 
MKS CDN391R AS01391-21-1 PCB 
LAM 852-014681-583 RF Generator ENI OEM-6A-11491-52 
AMAT 0190-09960 DIP CDN396 1263247 
ROLLER BRUSH CELL HDSIOC NOVELLUS 02-336512-00 REV. 1 
MKS CDN396R AS01396-6-5 PCB 
HDSIOC ROLLER BRUSH NOVELLUS 02-308058-00 VERSION 4.72 
XCEDA FAC HDSIOC NOVELLUS 02-309772-00 VERSION 4.72  
NATIONAL INSTRUMENTS GPIB-1014P 
PB02807 BM18164 DAN 9710094 
BM26015/L AB26015/N ASSY, H-STN XORB-100 
ISOC HI-LO TRANSFER NOVELLUS 02-131736-00 REV. A 
PT MVME 340B 84-W8787B01C 
BM302960000 /D 9923DAN 
PDL OXIDE HDSIOC 3 NOVELLUS 02-273741-00 VERSION 4.72 
DMA-W CONTROLLER WESSELS/WOLEVER 
ISIOC DAMA CLEAN BB-DFE DIGITAL DYNAMICS G19-10000-00 
502622 BM303030200 
SIOC wts-vh sioc 1 NOVELLUS 02-123968-00 REV. 2 
TEKTRONIX HANDLER INTERFACE BD. 59-0550-01 
AMETEK 80440K 94V-0, REV B 
Motorola MVME 340B 01-W3787B01B PCB, 84-W8787B01C 
Thermonics T-2500 Precision Temperature Forcing System  
Osaka TD2001 Turbo controller  
2 Granville phillips 20354017 vacuum gauge 
BOC EDWARDS QDP80 DRY VACUUM PUMP WITH AMAT CONTROLLER 
EDWARDS QDP80 DRY VACUUM PUMP + AMAT CONTROLLER BOX 
EDWARDS QDP80 DRY VACUUM PUMP with controller box 
AMAT 1150-00028 Electrode ORP combination, platinum BAN 
BOC EDWARDS QDP80 DRY VACUUM PUMP 208V + CONTROLLER BOX 
EFOS Novacure UV light source N2001-A1, 4.0 AMP, 250V 
EXFO Novacure Spot curing system N2100, 4.0 AMP, 250V 
Millipore WPSLC0C1L Waferpure C0-Micro Purifier, New 
vacuum components, parts, valves lot's of 13 
ENI LPG-6A RF Generator, Low Frequency 
NEW BOC edwards seal model # Coseal NW50 lot's of 20. 
Black-Ray long we ultriolet lamp, Model B 100 AP 
Eurotherm controller type J, 0-500 degrees, model# 812 
Richmond intelligent balance controller,RTI Ionize iS24 
Genmark, precision automated transfer systems, 5064340 
Thermo Neslab M25 chiller, used, as is 
NEWNET 56776ASSY91904-?504 REV N BOARD, AX7000 
UNIT UFC-1660, N2, SF6, Ar, lots of 3 used, as is 
1998 DSP research INC CIREXX2M-0 94V-0 4500 BOARD 
DAS-1801HC/1802?HC 14257 REV A PC8632 BOARD 
OPTO-22 PB32HQ, PAMUX B4 DIGITAL BRAIN BOARD  
BM44903/A 9945PRI T-M, PB29066 REV A COMP SIDE PRI 
CCD IMAGE SENSOR ASSY 04-709189-01 F, MCW-A9351 BOARD 
VARIAN TFS CCD INTERFACE ASSY 04-719216-01 REV D BOARD 
ProgramMation C1987-90 REV E, BM23995/H BOARD 
ASYST FLUOROTRAC SYSTEM TECH VLF-RD2008 
UNIT UFC-1660 N2, 50 SCCM, lots of 2, used, as is 
New Swagelok 1/2 Hose Adapter SS-PB8-TA8 
AMAT 0020-27812 SOURCE FRAME ALIGNMENT 
6 AMAT 0680-01202 CB K-FRAME PLUG 
AMAT 0010-04926 HV Module CESC, untested